Physical_Constant________________	          0	                                        
q0	                                         1.6022*10^-19	              C             
eps0	                                       8.8542*10^-12	              F/m           
mu0	                                        4*pi*10^-7	                 H/m           
NA	                                         6.0221*10^+23	              /mol          
kB	                                         1.3807*10^-23	              J/K           
Rg	                                         kB*NA	                      J/K/mol       
m_e	                                        9.1094*10^-31	              kg            
m_u	                                        1.6605*10^-27	              kg            
Material_Properties________________	        0	                                        
DeP	                                        120.0*10^4*(10^-2)^2	       m2/s * Torr   
MueP	                                       30.00*10^4*(10^-2)^2	       m2/Vs * Torr  
DiP	                                        40.00*10^0*(10^-2)^2	       m2/s * Torr   
MuiP	                                       14.44*10^2*(10^-2)^2	       m2/Vs * Torr  
Applied_Conditions________________	         0	                                        
Freq	                                       10.00*10^6	                 10 MHz        
Vapp	                                       100	                        V             
Pgas	                                       1	                          Torr          
Tgas	                                       300	                        K             
Ngas	                                       (Pgas*133.32)/(Rg*Tgas)*NA	 /m3           
De	                                         DeP/Pgas	                   m2/s          
Mue	                                        MueP/Pgas	                  m/Vs          
Di	                                         DiP/Pgas	                   m2/s          
Mui	                                        MuiP/Pgas	                  m/Vs          
ETHion	                                     4.8	                        eV            
ETHexc	                                     4.8	                        eV            
Simulation_Initial_Conditions_____________	 0	                                        
ne_init	                                    1.00*10^14	                               
ni_init	                                    1.00*10^14	                               
Special_Conditions_______________	          0	                                        
ne_th	                                      ne_init/10	                               
